Interest in the technology grew throughout the 1960s, and a number of companies commercialized silicon pressure sensors. Advancements in micromachining and silicon processing in the early 1970s then led to what could arguably be called the first true MEMS sensors, which had particular geometries that yielded superior performance. It was not until three decades later, however, that MEMS were small enough, cheap enough, and reliable enough to begin penetrating the consumer market.
Today, the overall MEMS market is fragmented and has an extremely diverse application set comprised of such things as oscillators, microfluidics, compasses, gyroscopes, accelerometers, microphones, and pressure sensors. For our purposes here, we're mostly concerned with MEMS accelerometers and—even more so—MEMS gyroscopes.