In view of the higher demands on quality and product safety from pharmaceutical production, sterile process engineering plays a significant part in the cost-effectiveness and safety of the production processes, in both upstream and downstream areas. Even in the further course of the process chain, up to cleaning and sterilization, contamination-free processing is a crucial quality factor. From measuring instruments, this demands a combination of the most up-to-date hygienic design and, at the same time, a high measuring accuracy.